N7 Logic via patterning using templated DSA

Bekaert, JoostJoostBekaertDoise, JanJanDoiseChan, BTBTChanGronheid, RoelRoelGronheidRyckaert, JulienJulienRyckaertVandenberghe, GeertGeertVandenbergheHer, YoungJunYoungJunHerCao, YiYiCao2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24974N7 Logic via patterning using templated DSA - implementation aspectsOral presentation