Beyer, GeraldGeraldBeyerMaex, KarenKarenMaexDaniels, StephenStephenDanielsMaity, NirmalyaNirmalyaMaityBassanini, DavideDavideBassanini2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3231IMP liners for Al via speed fillProceedings paper