Low frequency noise performance of gate-first and replacement metal gate CMOS technologies

Claeys, CorCorClaeysLee, Jae WooJae WooLeeSimoen, EddyEddySimoenVeloso, AnabelaAnabelaVelosoHoriguchi, NaotoNaotoHoriguchiParaschiv, VasileVasileParaschiv2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22155Low frequency noise performance of gate-first and replacement metal gate CMOS technologiesProceedings paper