The future of metallization and interconnection – Forecast of experts of the 6th metallization workshop

Beaucarne, GuyGuyBeaucarneSchubert, GunnarGunnarSchubertTous, LoicLoicTousHoornstra, JaapJaapHoornstra2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26326The future of metallization and interconnection – Forecast of experts of the 6th metallization workshopProceedings paperhttp://www.sciencedirect.com/science/article/pii/S1876610216310517