Photonic integrated alumina waveguide gratings for far-field structured illumination at UV wavelengths

Lin, ChupaoChupaoLinPenaranda, Juan Santo DomingoJuan Santo DomingoPenarandaDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernierSchaubroeck, DavidDavidSchaubroeckBaets, RoelRoelBaetsLe Thomas, NicolasNicolasLe Thomas2022-09-212022-09-092022-09-2120212160-9020WOS:000831479801316https://imec-publications.be/handle/20.500.12860/40405Photonic integrated alumina waveguide gratings for far-field structured illumination at UV wavelengthsProceedings paper978-1-943580-91-0WOS:000831479801316