Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy

Kragler, G.G.KraglerBender, HugoHugoBenderWilleke, GerhardGerhardWillekeBucher, E.E.BucherVanhellemont, JanJanVanhellemont2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/220Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopyJournal article