Mao, ShengpingShengpingMaoRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochusNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmans2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25606Modelling and experimental validation of cMUT cellsOral presentation