De Wolf, PeterPeterDe WolfTrenkler, ThomasThomasTrenklerClarysse, TrudoTrudoClarysseCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstSnauwaert, J.J.J.J.SnauwaertHellemans, L.L.Hellemans2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1180Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFMJournal article