High doping/high electric field effects on the characteristics of CMOS compatible p-n junctions

Simoen, EddyEddySimoenEneman, GeertGeertEnemanBargallo Gonzalez, MireiaMireiaBargallo GonzalezKobayashi, DaisukeDaisukeKobayashiLuque Rodriguez, AbrahamAbrahamLuque RodriguezJimenez Tejada, Juan-AntonioJuan-AntonioJimenez TejadaClaeys, CorCorClaeys2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17987High doping/high electric field effects on the characteristics of CMOS compatible p-n junctionsProceedings paper