Beyer, GeraldGeraldBeyerPantouvaki, MariannaMariannaPantouvakiTokei, ZsoltZsoltTokei2021-10-182021-10-1820100038-111Xhttps://imec-publications.be/handle/20.500.12860/16742Airgaps for interconnects: Ready to go?Journal articlehttp://online.qmags.com/SST0610