Davydova, NataliaNataliaDavydovavan Look, LieveLievevan LookWeldeslassie, AtakltiAtakltiWeldeslassieWiaux, VincentVincentWiauxHuddleston, LauraLauraHuddlestonSlachter, BramBramSlachterPellens, NickNickPellensTimmermans, FrankFrankTimmermansWittebrood, FrisoFrisoWittebroodvan Setten, EelcoEelcovan SettenWilson, DanielDanielWilson2024-04-162024-01-132024-04-162023978-1-5106-6748-80277-786XWOS:001125089900001https://imec-publications.be/handle/20.500.12860/43409Stitching for High NA: zooming in on CDU budgetProceedings paper10.1117/12.2687703978-1-5106-6749-5WOS:001125089900001