Stalmans, LievenLievenStalmansVazsonyi, EvaEvaVazsonyiBender, HugoHugoBenderSzilagyi, E.E.SzilagyiJalsovsky, G.G.JalsovskyHorvath, Z. E.Z. E.HorvathPetrik, P.P.PetrikPoortmans, JefJefPoortmansNijs, JohanJohanNijs2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2157Formation mechanism of chemically etched porous siliconOral presentation