Raza, AliAliRazaClemmen, StephaneStephaneClemmenWuytens, PieterPieterWuytensMuneeb, MuhammadMuhammadMuneebVan Daele, MicheilMicheilVan DaeleDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernierSkirtach, AndreAndreSkirtachBaets, RoelRoelBaets2021-10-262021-10-262018-102378-0967https://imec-publications.be/handle/20.500.12860/31640ALD assisted nanoplasmonic slot waveguide for on-chip enhanced raman spectroscopyJournal articlehttps://doi.org/10.1063/1.5048266