Mannarino, ManuelManuelMannarinoChintala, Ravi ChandraRavi ChandraChintalaMoussa, AlainAlainMoussaMerckling, ClementClementMercklingEyben, PierrePierreEybenParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-2220150021-8979https://imec-publications.be/handle/20.500.12860/25605Surface characterization of InP trenches embedded in oxide using scanning probe microscopyJournal articlehttp://scitation.aip.org/content/aip/journal/jap/118/22/10.1063/1.4936895