Miniature integrated spectrometer fabricated on a silicon-on-insulator substrate

Brouckaert, JoostJoostBrouckaertRoelkens, GuntherGuntherRoelkensSelvaraja, ShankarShankarSelvarajaBogaerts, WimWimBogaertsDumon, PieterPieterDumonVerstuyft, S.S.VerstuyftYu, Zong-QiangZong-QiangYuVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-11https://imec-publications.be/handle/20.500.12860/13457Miniature integrated spectrometer fabricated on a silicon-on-insulator substrateProceedings paper