Wostyn, KurtKurtWostynSano, Ken-IchiKen-IchiSanoDe Marco, CinziaCinziaDe MarcoKenis, KarineKarineKenisVan Den Heuvel, DieterDieterVan Den HeuvelJanssens, TomTomJanssensBearda, TwanTwanBeardaLeunissen, PeterPeterLeunissenMertens, PaulPaulMertensEitoku, AtsuroAtsuroEitoku2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13233Damage review on gate stack test structures after high-velocity aerosol cleaningProceedings paper