Sakic, A.A.SakicCivale, YannYannCivaleNanver, L.K.L.K.NanverBiasotto, C.C.BiasottoJovanovic, V.V.Jovanovic2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17931Al-mediated solid-phase epitaxy of silicon-on-insulatorProceedings paper