Experimental demonstration of high source velocity and its enhancement by uniaxial stress in Ge PFETs

Kobabyashi, MasaharuMasaharuKobabyashiMitard, JeromeJeromeMitardIrisawa, ToshihumiToshihumiIrisawaHoffmann, Thomas Y.Thomas Y.HoffmannMeuris, MarcMarcMeurisSaraswat, KrishnaKrishnaSaraswatNishi, YoshioYoshioNishiHeyns, MarcMarcHeyns2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17387Experimental demonstration of high source velocity and its enhancement by uniaxial stress in Ge PFETsProceedings paper