Degradation and breakdown in thin oxide layers: mechanisms, models and reliability prediction

Degraeve, RobinRobinDegraeveKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3395Degradation and breakdown in thin oxide layers: mechanisms, models and reliability predictionJournal article