Prasadam, Vasu PrasadVasu PrasadPrasadamBahlawane, NaoufalNaoufalBahlawaneMattelaer, FelixFelixMattelaerRampelberg, GeertGeertRampelbergDetavernier, ChristopheChristopheDetavernierFang, LibinLibinFangJiang, YinzhuYinzhuJiangMartens, KoenKoenMartensParkin, IvanIvanParkinPapakonstantinou, IoannisIoannisPapakonstantinou2021-10-272021-10-2720192468-5194https://imec-publications.be/handle/20.500.12860/33823Atomic layer deposition of vanadium oxides: process and application reviewJournal articlehttps://doi.org/10.1016/j.mtchem.2019.03.004