Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity

Travaly, YoussefYoussefTravalySchuhmacher, J.J.SchuhmacherMartin Hoyas, AnaAnaMartin HoyasAbell, T.T.AbellSutcliffe, VicVicSutcliffeJonas, M.M.JonasVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11330Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivityJournal article