Cleaning challenges of high-k/metal gate structures

Hussain, Muhammad M.Muhammad M.HussainShamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivSano, KenichiKenichiSanoReinhardt, Karen A.Karen A.Reinhardt2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19102Cleaning challenges of high-k/metal gate structuresBook chapter