Pan, WanlingWanlingPanFiorini, PaoloPaoloFioriniDi Monaco, OrsolaOrsolaDi MonacoBaert, KrisKrisBaertNauwelaers, BartBartNauwelaersMertens, RobertRobertMertens2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6691Micromachined tunable dielectric resonatorsProceedings paper