Initial assessment of the impact of a hard pellicle on imaging using a 193 nm step-and-scan system

De Bisschop, PeterPeterDe BisschopKocsis, MichaelMichaelKocsisBruls, R.R.BrulsVan Peski, C.C.Van PeskiGrenville, A.A.Grenville2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8751Initial assessment of the impact of a hard pellicle on imaging using a 193 nm step-and-scan systemJournal article