Etching of Co-Pd with significantly reduced sidewall re-deposition

Radisic, DunjaDunjaRadisicNishimura, EiichiEiichiNishimuraKushibiki, MasatoMasatoKushibikiWataru, ShimizuShimizuWataruTahara, ShigeruShigeruTaharaXu, KaidongKaidongXuKim, WoosikWoosikKimBoullart, WernerWernerBoullart2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22967Etching of Co-Pd with significantly reduced sidewall re-depositionMeeting abstract