ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors

Schaekers, MarcMarcSchaekersOpsomer, KarlKarlOpsomerDeduytsche, DavyDavyDeduytscheDetavernier, ChristopheChristopheDetavernierBlasco, NicolasNicolasBlascoZauner, AndyAndyZauner2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14428ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursorsOral presentation