Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe

Van Barel, GregGregVan BarelVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisVerbist, AgnesAgnesVerbistWitvrouw, AnnAnnWitvrouw2021-10-162021-10-162007-03https://imec-publications.be/handle/20.500.12860/13012Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGeMeeting abstract