Parton, ElsElsPartonBeaucarne, GuyGuyBeaucarneDross, FredericFredericDrossPoortmans, JefJefPoortmans2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14272Thin, thinner, thinnest: a new methodology for micrometric techJournal article