High resolution silicon-on-insulator mid-infrared spectrometers operating at 3.3 μm

Vasiliev, AntonAntonVasilievMuneeb, MuhammadMuhammadMuneebBaets, RoelRoelBaetsRoelkens, GuntherGuntherRoelkens2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29798High resolution silicon-on-insulator mid-infrared spectrometers operating at 3.3 μmProceedings paper