Ragnarsson, Lars-AkeLars-AkeRagnarssonBrunco, DavidDavidBruncoYamamoto, KazuhikoKazuhikoYamamotoTokei, ZsoltZsoltTokeiPourtois, GeoffreyGeoffreyPourtoisDelabie, AnneliesAnneliesDelabieParmentier, BrigitteBrigitteParmentierConard, ThierryThierryConardRoussel, PhilippePhilippeRousselDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-182021-10-1820090013-4651https://imec-publications.be/handle/20.500.12860/16084The importance of moisture control for EOT scaling of Hf-based dielectricsJournal article