Structural and optical properties of Ge islands grown in an industrial chemical vapor deposition reactor

Loo, RogerRogerLooMeunier-Beillard, PhilippePhilippeMeunier-BeillardVanhaeren, DanielleDanielleVanhaerenBender, HugoHugoBenderCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstDentel, D.D.DentelGoryll, M.M.GoryllVescan, L.L.Vescan2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5454Structural and optical properties of Ge islands grown in an industrial chemical vapor deposition reactorJournal article