Germanium content dependence of the leakage current of recessed SiGe source/drain junctions

Simoen, EddyEddySimoenBargallo Gonzalez, MireiaMireiaBargallo GonzalezEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenBenedetti, AlessandroAlessandroBenedettiBender, HugoHugoBenderLoo, RogerRogerLooClaeys, CorCorClaeys2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12898Germanium content dependence of the leakage current of recessed SiGe source/drain junctionsJournal article