Transmission electron diffraction techniques for nm scale strain measurements in semiconductors

Vanhellemont, JanJanVanhellemontJanssens, KoenraadKoenraadJanssensFrabboni, S.S.FrabboniSmeys, PeterPeterSmeysBalboni, R.R.BalboniArmigliato, A.A.Armigliato2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1609Transmission electron diffraction techniques for nm scale strain measurements in semiconductorsProceedings paper