Mannaert, GeertGeertMannaertPosthuma, NielsNielsPosthumaDe Jaeger, BriceBriceDe JaegerVan Hove, MarleenMarleenVan HoveXu, KaidongKaidongXuDecoutere, StefaanStefaanDecoutereParaschiv, VasileVasileParaschiv2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24195Etch development for E-mode GaN power HEMT fabricationMeeting abstract