The influence of hydrogenation on the effective lifetime of silicon wafers

Ulyashin, A.A.UlyashinScherff, M.M.ScherffJob, R.R.JobFahrner, W.W.FahrnerBilyalov, RenatRenatBilyalovMatic, ZdeslavZdeslavMaticPoortmans, JefJefPoortmans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6900The influence of hydrogenation on the effective lifetime of silicon wafersOral presentation