LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration

Kocaay, DenizDenizKocaayRoussel, PhilippePhilippeRousselCroes, KristofKristofCroesCiofi, IvanIvanCiofiSaad, YvesYvesSaadDe Wolf, IngridIngridDe Wolf2021-10-242021-10-2420170026-2714https://imec-publications.be/handle/20.500.12860/28699LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field accelerationJournal articlehttp://www.sciencedirect.com/science/article/pii/S002627141730241X?via%3Dihub