Hexagonal boron nitride nanowalls synthesised by unbalanced RF magnetron sputtering

Benmoussa, BoumedieneBoumedieneBenmoussaD'Haen, JanJanD'HaenBorschel, ChristianChristianBorschelSaitner, MarcMarcSaitnerSoltani, AliAliSoltaniMortet, VincentVincentMortetRonning, CarstenCarstenRonningD'Olieslaeger, MarcMarcD'OlieslaegerBoyen, Hans-GerdHans-GerdBoyenHaenen, KenKenHaenen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16738Hexagonal boron nitride nanowalls synthesised by unbalanced RF magnetron sputteringMeeting abstract