ALD Ru and its applications in DRAM MIM-capacitors and interconnect

Schaekers, MarcMarcSchaekersSwerts, JohanJohanSwertsAltimime, LaithLaithAltimimeTokei, ZsoltZsoltTokei2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19740ALD Ru and its applications in DRAM MIM-capacitors and interconnectProceedings paper