Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)

Joshi, AbhijeetAbhijeetJoshiRengo, GianlucaGianlucaRengoPorret, ClémentClémentPorretLin, Kun-LinKun-LinLinChang, Chia-HeChia-HeChangBasol, BulentBulentBasol2022-04-292021-12-152022-04-292021-05nahttps://imec-publications.be/handle/20.500.12860/38611Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)Meeting abstract