Hantschel, ThomasThomasHantschelTsigkourakos, MenelaosMenelaosTsigkourakosKluge, JuliaJuliaKlugeWerner, ThiloThiloWernerZha, LichenLichenZhaParedis, KristofKristofParedisEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014-09https://imec-publications.be/handle/20.500.12860/23905Overcoated diamond tips for nanometer-scale semiconductor device characterizationProceedings paper