Ponomarev, YouriYouriPonomarevLoo, JosineJosineLooDachs, CharlesCharlesDachsCubaynes, FlorenceFlorenceCubaynesVerheijen, M. A.M. A.VerheijenKaiser, M.M.Kaiservan Berkum, J. G. M.J. G. M.van BerkumKubicek, StefanStefanKubicekBolk, J.J.BolkRovers, MadelonMadelonRovers2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5582A manufacturable 25nm planar MOSFET technologyProceedings paper