Mortet, VincentVincentMortetSoltani, A.A.SoltaniTalbi, A.A.TalbiPobedinskas, P.P.PobedinskasHaenen, KenKenHaenende Jaeger, J.C.J.C.de JaegerPernod, P.P.PernodWagner, PatrickPatrickWagner2021-10-182021-10-1820091876-6196https://imec-publications.be/handle/20.500.12860/15893AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuatorsJournal article