Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13um SiGe:C NPN HBT technology

Put, SofieSofiePutSimoen, EddyEddySimoenVan Huylenbroeck, StefaanStefaanVan HuylenbroeckClaeys, CorCorClaeysVan Uffelen, MarcoMarcoVan UffelenLeroux, PaulPaulLeroux2021-10-182021-10-1820090018-9499https://imec-publications.be/handle/20.500.12860/16063Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13um SiGe:C NPN HBT technologyJournal article