Tomasini, PierrePierreTomasiniMachkaoutsan, VladimirVladimirMachkaoutsanThomas, ShawnShawnThomasLoo, RogerRogerLooCaymax, MattyMattyCaymaxVerheyen, PeterPeterVerheyen2021-10-182021-10-1820100040-6090https://imec-publications.be/handle/20.500.12860/18095Stability of silicon germanium stressorsJournal article