Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

Bogdanowicz, JanuszJanuszBogdanowiczDortu, FabianFabianDortuClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstRosseel, ErikErikRosseelNguyen, DuyDuyNguyenShaughnessy, DerrickDerrickShaughnessySalnick, AlexAlexSalnickNicolaides, LenaLenaNicolaides2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/16771Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curvesJournal article