Characterization and Reliability Study of an Al-Doped HfO2-Based High-Density 2.5-D MIMCAP

Chery, EmmanuelEmmanuelCheryCroes, KristofKristofCroesNolmans, PhilipPhilipNolmansBeyne, EricEricBeyne2024-08-222024-04-262024-08-2220240018-9383WOS:001205831900001https://imec-publications.be/handle/20.500.12860/43880Characterization and Reliability Study of an Al-Doped HfO2-Based High-Density 2.5-D MIMCAPJournal article10.1109/TED.2024.3386871WOS:001205831900001TEMPERATURE-DEPENDENCEHFO2CAPACITORSBREAKDOWNDEPOSITIONREDUCTIONFILMSTIN