Reliable micro-transfer printing method for heterogeneous integration of lithium niobate and semiconductor thin films

Vandekerckhove, TomTomVandekerckhoveVanackere, TomTomVanackereDe Witte, JasperJasperDe WitteCuyvers, StijnStijnCuyversReis, LuisLuisReisBillet, MaximilienMaximilienBilletRoelkens, GuntherGuntherRoelkensClemmen, StephaneStephaneClemmenKuyken, BartBartKuyken2024-01-312023-08-112024-01-3120232159-3930WOS:001032516500009https://imec-publications.be/handle/20.500.12860/42320Reliable micro-transfer printing method for heterogeneous integration of lithium niobate and semiconductor thin filmsJournal article10.1364/OME.494038WOS:001032516500009WAVE-GUIDESSILICONEFFICIENCYCONVERSION