Heyne, MarkusMarkusHeyneChiappe, DanieleDanieleChiappeMeersschaut, JohanJohanMeersschautNuytten, ThomasThomasNuyttenConard, ThierryThierryConardBender, HugoHugoBenderHuyghebaert, CedricCedricHuyghebaertRadu, IulianaIulianaRadude Marneffe, Jean-FrancoisJean-Francoisde MarneffeNeyts, Erik C.Erik C.NeytsDe Gendt, StefanStefanDe Gendt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26721Sulfurization of metallic and oxidized molybdenum thin filmsOral presentation