Highly uniform AlGaAs/GaAs and InGaAs(P)/InP structures grown in a novel 3x2'' vertical rotating disc MOVPE-reactor

Zhang, X.X.ZhangMoerman, IngridIngridMoermanSys, CarlCarlSysDemeester, PietPietDemeesterCrawley, J. A.J. A.CrawleyThrush, E. J.E. J.Thrush2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1683Highly uniform AlGaAs/GaAs and InGaAs(P)/InP structures grown in a novel 3x2'' vertical rotating disc MOVPE-reactorOral presentation