Quasi-3D method: time-efficient TCAD and mixed-mode simulations on finFET technologies

Hellings, GeertGeertHellingsChen, Shih-HungShih-HungChenLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzGroeseneken, GuidoGuidoGroeseneken2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22471Quasi-3D method: time-efficient TCAD and mixed-mode simulations on finFET technologiesProceedings paper